Semiconductor Materials
JSR is a global leader in cutting-edge materials for the semiconductor industry. We provide comprehensive solutions across the entire semiconductor manufacturing process and support customers to enhance yields and optimize productivity, thereby contributing to the advancement and mass production of next-generation devices. By upgrading advanced technologies and maintaining an unwavering commitment to quality and manufacturing excellence, we continue to deliver reliable, sustained value to the industry.
Lithography Materials
Photoresists & Multilayer Materials
The lithography process is a core technology that determines the scaling and performance of semiconductor devices. JSR offers a comprehensive portfolio that includes photoresists from i-line to EUV, as well as a variety of organic and inorganic multilayer materials. By offering a comprehensive portfolio and advancing material designs that simultaneously enable high device performance and high reliability, we continuously support our customers’ process innovation fromcutting-edge nodes to legacy ones.
Process Materials
CMP Materials (Slurries/Cleaning Solutions)
CMP slurries and post-CMP cleaning solutions are essential to high-performance LSI manufacturing. JSR’s materials offer high planarization performance and selectivity, achieving defect reduction and high reproducibility to meet device scaling demands.
Cleaning Solutions
Functional cleaning solutions efficiently remove fine particles, metal ions, and reaction byproducts remaining on substrate surfaces before and after SAM treatment following etching.
ALD/CVD Materials
Precursors for ALD/CVD
Based on advanced molecular design, synthesis technology, and quality control systems, we enable atomic-layer-level film thickness control, achieving excellent film quality, uniformity, and step coverage. Our materials’ high purity, low metal contamination, and stable supply support a wide range of applications, including gate dielectrics, barrier metal, and wiring formation for advanced semiconductors.
Dopants
JSR provides high-purity dopant materials for controlling the electrical properties of semiconductor devices. We achieve high purity and precise concentration control, enabling uniform doping.