Notice Regarding Investment in Inpria Corporation
Corporate
TOKYO, Japan - July 12, 2017 - JSR Corporation announced today that it has invested in Inpria Corporation by joining the company’s Series B funding round, designed to promote its initiatives for commercializing EUV (Extreme Ultraviolet) photoresists.
With a focus on providing practical EUV materials solutions, JSR and Inpria intend to collaborate in addressing the global semiconductor industry's most critical and advanced patterning process requirements.
From the company’s inception, Inpria has been engaged in non-chemically amplified photoresist development. Inpria’s materials demonstrate excellent resolution for EUV exposure, better dry etching durability than ordinary organic materials, and other unique features, as reported at various industry conferences.
Press Release from Inpria (July 2017)
"EUV Photoresist Pioneer Inpria raises $23.5 Million in Series B Funding
Led by Samsung Ventures －Inpria Brings Together Industry Leaders to Scale Enabling Materials for EUV Lithography"
With a focus on providing practical EUV materials solutions, JSR and Inpria intend to collaborate in addressing the global semiconductor industry's most critical and advanced patterning process requirements.
From the company’s inception, Inpria has been engaged in non-chemically amplified photoresist development. Inpria’s materials demonstrate excellent resolution for EUV exposure, better dry etching durability than ordinary organic materials, and other unique features, as reported at various industry conferences.
Press Release from Inpria (July 2017)
"EUV Photoresist Pioneer Inpria raises $23.5 Million in Series B Funding
Led by Samsung Ventures －Inpria Brings Together Industry Leaders to Scale Enabling Materials for EUV Lithography"