| JSR TECHNICAL REVIEW No.111 (March, 2004) |
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| Spin-on-glass(SOG) for Tri-layer Imaging Process |
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Hikaru Sugita , Akio Saito , Keiji Konno , Akihiro Hayashi , Satoru Nishiyama , Masahiko Ebisawa , Michinori Nishikawa , Yoshihisa Oota , Tetsuo Tominaga |
 Maleic acid-catalyzed hydrolysis and condensation of tetramethoxysilane was carried out in 1-propoxy-2-propanol to prepare a spin-on-glass (SOG) material for tri-layer imaging process. The material was found to be stable enough for industry use. Minor amounts of methylsilsesquioxane and photo acid generators was introduced into the material. Thin resist (top layer) patterns were imaged on the SOG film (intermediatelayer) which was coated on a hard baked i-line resist (bottom layer). The SOG film showed sufficient adhesion to the resist patterns and superior resist profiles were imaged on the film. |
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| Single-mode Optical Fiber Interconnection by using Self-Written Waveguides |
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Fujun Huang , Kentarou Tamaki , Hideaki Takase , Yuuichi Eriyama , Takashi Ukachi |
| Formation of self-written waveguide between two single-mode fibers has been demonstrated by using an acrylic/epoxy hybrid resin. The core of the waveguide based on the photo polymerization of the acrylic component was formed with 405nm laser irradiation through the fibers. All solid type self-written waveguides were also fabricated by irradiating 365nm UV light on the resin after core formation. The selfwritten waveguide showed low connection loss at 1,550nm even in the presence of both gap and lateral offset between two fibers. |
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| A General Method to Induce Durable Liquid-Crystal Pretilt Angle on Photo-Alignment Films |
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Masayuki Kimura , Shoichi Nakata , Yutaka Makita , Yasuo Matsuki , Atsushi Kumano , Yasumasa Takeuchi , Hiroshi Yokoyama |
| A normal-incidence single-exposure scheme to obtain a stable pretilted alignment of nematic liquid crystals on photo-alignment polymer layers is proposed. The new scheme consists in periodically modulating the intensity of the normally incident linearly polarized near-ultraviolet light and unidirectionally scanning it on the photosensitive alignment layer. By properly choosing the relative directions of scan and polarization, this scheme works for any types of photo-alignment materials regardless of the resultant alignment direction relative to the polarization direction of the UV light. The pretilt appears in such a way that the nematic director is lifted up in the scan direction, similar to the case of the conventional cloth rubbing. This "photo-rubbing" method allows a fairly accurate control of the pretilt angle by way of the scan speed and the light intensity. |
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| Application of a New Evaluation Method of Sheet Appearance to Various Coated Papers |
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Nobuhiro Matsuda , Kasuke Fujita , Hisashi Matsui , Yoshiaki Zama |
| We developed a new method for evaluating the sheet appearance using a scanning white-light interferometer. We found the standard deviation of the slope angle area ratio (SDS), with the optimal threshold of |3°|, was strongly related to sheet appearance. The narrower the distribution of the slope angle area ratio (SAAR) becomes, the better the sheet appearance. Moreover, we measured the ultra fine surface profiles of various coated papers, and studied the influence of SDS on sheet appearance.
As a result, we found the optimal threshold for binary transformation of the average of surface slope angles (ASSA) changes depending upon the kind of coated papers, and that the optimal threshold is |7°| for A2 coated paper and |10°| for A3 coated paper. We also found correlation with sheet appearance is best when it is not concerned with the kind of coated papers but SAAR after binary thresholding becomes 70%.
This method can accurately evaluate sheet appearance. |
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