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Toward the development of electron transport materials in polymer based Light Emission Diodes (LEDs), we synthesized new mainchain polyoxadiazoles containing an indane ring in the backbone. Since the indane ring is bulky and leads to a twisting of the structure, the polyoxadiazoles are well soluble in organic solvents, such as N-methylpyrrolidone, chloroform, and tetrachloroethane. The polyoxadiazoles are thermally stable and show good electron transport properties. Therefore, the polyoxadiazoles are good candidates as electron transport materials in polymer LEDs.

Effect of Film Thickness on Electrical Properties of Polyimide Thin Films

Tao Liang , Yutaka Makita , Shin-ichi Kimura

Dielectric constant and conduction current of thin/ultrathin polyimides films on substrates with thick- ness of 80-2000nm were measured by using a small electrode system. Polyimides used in this study were poly(diphenylmethane-2, 3, 5-tricarboxycyclopentyl aceticimide, TCA-DDM) and poly(pyromellitic dianhy- dride oxydianiline, PMDA-ODA). With decreasing film thickness, the dielectric constant decreased and the leakage current increased. Using the IR reflection absorption spectroscopy, we found that the polyimide chains were oriented parallel to the electrodes. The dependence of the dielectric constants on film thick- ness was explained by the orientation of polymer chains.

193 SLR System based on COMA-Acryl hybrid system

Masafumi Yamamoto , Hiroyuki Ishii , Tsutomu Shimokawa

Cycloolefin/maleic anhydride copolymer system (COMA) is one of the promising approach to high performance single layer resist for 193nm lithography. Since hydrophilicity of the material is required for more adhesion to inorganic substrates, several acrylate monomers with hydroxyl-functionalized alicyclic pendant groups were applied into acrylate-hybrid COMA systems. The hydrophilicity of each chemical was estimated by the computer aided group contribution method. Several COMA/acrylate-hybrid polymers were synthesized by radical polymerization, and the dark film loss measurement and resin characterization experiments regarding new hybrid resins were carried out. A resist comprising an optimized hybrid poly- mer has shown 60nm isolated line on a 0.55NA micro-stepper without any optical enhancement techniques, and another resist could print 110nm line/325nm pitch with >0.7 DOF on SiON substrate.

Inorganic Compounds as Coatings on Polymer Particles and as Hollow Spheres

Hiroshi Shiho , Nobuo Kawahashi

Spherical polymer particles have been coated with uniform layers of iron oxides, cupric basic carbon- ate, and titanium dioxide by controlled hydrolysis of FeCl3, Cu(NO3)2, and titanium tetrabutoxide, respec- tively. The thickness of the coating layer could be altered by adjusting the concentration of reagent and the amount of polymer latex added to the system. Magnetic or electrical conductive properties were adjusted by appropriate heating of the coated powders in an atmosphere of hydrogen. Hollow inorganic spheres were obtained by calcination of the so-coated polymer lattices at an elevated temperature.

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