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| Lithography Materials |
| JSRfs full product line for imaging super critical features includes 248 and 193nm positive and negative tone photoresists, and g-line and i-line resists for critical and non-critical applications. JSR also provides a full array of related materials, including spin-on hardmask materials for advanced technologies. |
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| Interconnect Materials |
| This product line-up includes spin-on Low-k materials, which offer improved chemical resistance and mechanical strength and other materials that are designed for use inadvanced multilayer interconnects for the latest and future semiconductor devices. |
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| CMP Materials |
| -CMP Slurries |
| This product line-up includes slurries for Cu applications, which enable improved dishing and erosion performance, and for STI applications, which achieve superior planarity and scratch performance. These slurries are developed using JSRfs proprietary technologies. |
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| -CMP Pads |
| CMP pads are developed using JSRfs polymer technologies that enable adjustable surface conditions suitable for each application, resulting in well-balanced,superior polishing performance. |
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| Thick Photoresists (THB series) |
| THB series photoresists are used in pattering over flip-chip ICs and various types of substrates. Negative tone materials can coat up to 100μm while positive tones can coat up to 60μm thick. Both negative and positive tone THB photoresists enable high aspect ratio imaging with good resistance to various solder solutions. |
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| Photosensitive Insulation Materials |
| WPR series are used as spin-on photo sensitive insulation materials for re-distribution line layers and over coat layers for WL-CSP (Wafer Level Chip Scale Package) or SiP (System in Package) and for organic passivation layers for semiconductor devices. |
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| Testing Fixture and other Products |
| PCR® materials are anisotropic conductive sheets, which consist of conductive particles stacked in the Z-axis. Conductive conditions occur from the top to the bottom of the sheet with the application of pressure. |
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| Circuit Testing Fixtures |
| -Printed Circuit Board Testing Fixture |
| Available for high density PCB testing by using a PCR® as a contactor for fixtures. It achieves stable contacts to fine pitches down to 60μm and Kelvin electric resistance measurement with mΩ accuracy. (Produced and sold by JSR MICROTECH INC.) |
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| -IC Testing Fixtures |
| Newly developed PCR® enables the IC testing fixtures suitable for burn-in testing, functional testing, and high frequency testing. It is capable of corresponding to the testing multiple pin ICs, chips with super-fine pitches, and/or irregular patterns. This testing fixture with new PCR® has outstanding characteristics, such as a soft touch on the device surface, allowing for high tolerance of contact alignments, and the capability to test high frequency devices. (Produced and sold by JSR MICROTECH INC.) |
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